Photonic properties of periodic arrays of nanometer-wide metal lines
Elias, Quentin
Promoteur(s) : Vanderheyden, Benoît
Date de soutenance : 7-sep-2020/9-sep-2020 • URL permanente : http://hdl.handle.net/2268.2/10788
Détails
Titre : | Photonic properties of periodic arrays of nanometer-wide metal lines |
Titre traduit : | [fr] Propriétés photoniques de résaux périodiques constitués de fils métalliques nanométriques |
Auteur : | Elias, Quentin |
Date de soutenance : | 7-sep-2020/9-sep-2020 |
Promoteur(s) : | Vanderheyden, Benoît |
Membre(s) du jury : | Bogdanowicz, Janusz
Nguyen, Ngoc Duy Redouté, Jean-Michel |
Langue : | Anglais |
Nombre de pages : | 166 |
Mots-clés : | [en] reflectance [en] transmittance [en] array [en] periodic [en] metal [en] copper [en] interconnect [en] metrology [en] geometry [en] pitch [en] width [en] height [en] perfect electric conductor [en] pec [en] band structure [en] waveguide [en] diffraction [en] grating [en] plasmonic [en] surface [en] plasmon [en] polariton [en] semiconductor [en] oxide [en] scatterometry [en] raman [en] moore [en] ruthenium [en] platinum [en] thin-film [en] extraordinay [en] optical [en] transmission [en] cutoff [en] mode [en] dispersion [en] relation [en] propagation [en] evanescent [en] nanometer [en] photonic |
Discipline(s) : | Physique, chimie, mathématiques & sciences de la terre > Physique |
Centre(s) de recherche : | IMEC |
Public cible : | Chercheurs Professionnels du domaine Etudiants |
Institution(s) : | Université de Liège, Liège, Belgique |
Diplôme : | Master en ingénieur civil physicien, à finalité approfondie |
Faculté : | Mémoires de la Faculté des Sciences appliquées |
Résumé
[en] In this master thesis, the interaction of light with periodic arrays of nanometer-wide metal lines arestudied. To do so, extensive use of wave optics, waveguide and diffraction grating theories is made to better understand the interaction of light with a structure made of perfect electrical conductor (PEC) lines, both for TE and TM polarizations. In particular, we propose to gather the results of those theories in an original band structure to understand how light can couple into the array as a function of the geometrical parameters. The structure is viewed as periodic metallic waveguides simultaneously constituting a diffraction grating. The model is used to analyze quantitative numerical finite element calculations of reflectance and transmittance spectra (obtained using COMSOL Multiphysics). First, a grating of PEC lines is studied. Then an array of copper lines is analyzed and compared to the PEC lines.
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