Master Thesis Online
Master thesis and internship[BR]- Master's thesis : Investigation of TiN micro-heaters microfabrication pathways[BR]- Internship
Batlle Mari, Lucas 
Promotor(s) :
Fleury-Frenette, Karl
Date of defense : 24-Jun-2024/25-Jun-2024 • Permalink : http://hdl.handle.net/2268.2/20419
TFE-Final.pdfDetails
| Title : | Master thesis and internship[BR]- Master's thesis : Investigation of TiN micro-heaters microfabrication pathways[BR]- Internship |
| Translated title : | [fr] Investigation du nitrure de titane déposé par laser pour la réalisation de micro-éléments chauffants |
| Author : | Batlle Mari, Lucas
|
| Date of defense : | 24-Jun-2024/25-Jun-2024 |
| Advisor(s) : | Fleury-Frenette, Karl
|
| Committee's member(s) : | Ziemons, Eric
Gailly, Patrick
Lahmaïd, Ismaël
|
| Language : | English |
| Number of pages : | 93 |
| Keywords : | [en] Microheaters [en] Titanium nitride [en] TiN [en] Sputtering [en] Ion Beam Sputtering [en] IBS [en] Laser-Induced Forward Transfer [en] LIFT Thin films |
| Discipline(s) : | Engineering, computing & technology > Aerospace & aeronautics engineering |
| Target public : | Researchers Professionals of domain Student |
| Institution(s) : | Université de Liège, Liège, Belgique |
| Degree: | Master en ingénieur civil en aérospatiale, à finalité spécialisée en "aerospace engineering" |
| Faculty: | Master thesis of the Faculté des Sciences appliquées |
Abstract
[en] This work is an investigation of preliminary steps in the microfabrication of titanium nitride microheaters to be integrated under the surface of flight mirrors. This work focuses on the analysis of titanium thin films properties as a function of thickness.
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